Semiconductor Industry

With years of industry experience, we have achieved certain results in the field of fluorosilicone rubber (FVMQ) and perfluoroether rubber (FFKM) for semiconductors, which are globally leading products. Our products can meet the challenges of high and low temperatures as well as ammonia resistance required for semiconductor sealing.

In semiconductor manufacturing equipment, rubber seals are used at various cavity and pipeline connection parts. They can prevent the intrusion of external impurities, ensuring a high-purity production environment inside and avoiding the influence of impurities on the performance and quality of semiconductor chips. For example, in the sealing system of lithography machines, rubber seals ensure a stable environment during the lithography process, preventing tiny particles from contaminating the photoresist and affecting the accuracy of chip patterns.

Rubber shock-absorbing pads are also commonly used rubber components. Semiconductor manufacturing equipment is extremely sensitive to vibration. Rubber shock-absorbing pads can effectively absorb the vibration generated during equipment operation, reducing the displacement and precision deviation of equipment components caused by vibration, ensuring the stable operation of the equipment and improving the production yield.

In addition, rubber suction cups are widely used in the handling and assembly of semiconductor chips. With their good adsorption and flexibility, they can safely and stably pick up chips, avoiding damage to the chips during the operation.

We utilize proprietary polymer and process technologies, as well as various compression molding capabilities, to provide the most comprehensive sealing combinations. For advanced manufacturing processes, we develop customized and perfect solutions for the most critical applications.

High-standard Inspection and Quality Control

We are committed to continuous innovation and research and development, and ensure an uninterrupted supply of goods.

MOKEN is dedicated to researching and developing a wide range of innovative sealing materials and products. Facing the harsh semiconductor manufacturing environment, we provide excellent sealing integrity. The semiconductor industry has special requirements for O-rings in terms of temperature resistance and chemical resistance.